Used SEMITOOL Sirius #9192672 for sale
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ID: 9192672
Wafer Size: 6"
Hydrozone system, 6"
Dual cassette
PSC-402B Controller
A182-60MB Rotors.
SEMITOOL Sirius is a state-of-the-art photoresist equipment designed to provide advanced technology for semiconductor lithography. It is a specialized machinery for processing thin film layers in the fabrication of semiconductor devices. The unique design and ultrafine engineering of Sirius system allows it to deliver superior quality and maximum efficiency in photoresist processing. The unit is equipped with all the necessary components, including a fully integrated MPW (multi-project wafer) platform for multiple fabrication lines. It is capable of processing wafers up to 25mm in diameter and 6mm in thickness. The machine is also configured to include spin and spray options for the accurate and uniform application of photoresists onto wafers. The tool is designed to feature a new and improved user interface, with several user-friendly displays enabling easy navigation and efficient use. It is equipped with advanced software which provides enhanced diagnostics, monitoring, and control capabilities, allowing users to autonomously monitor process parameters within the asset. Automatic substrate recognition and automated control of model functions are also available, which allow users to quickly and accurately set up and run processes with minimal supervision. In addition, SEMITOOL Sirius is designed with safety in mind, featuring built-in safety features such as automatic ventilation, interlocks, and air turbulence sensors which are designed to ensure adequate and safe operation. The equipment also comes with a comprehensive package of after-sales services to ensure fast and effective maintenance and support of the system. Sirius photoresist unit is ideal for both professional labs and in-house electronics fabrication, and its advanced features ensure the highest quality of photoresist processing with maximum efficiency. With its user-friendly design and advanced technology, this machine truly sets the benchmark for advanced photoresist processing.
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