Used SEMITOOL Sirius #9229812 for sale

SEMITOOL Sirius is a photoresist equipment specifically designed to meet the demands of the most challenging semiconductor device fabrication processes. It is an automated, full-featured system designed to provide superior performance, accuracy, and ease of use. Sirius consists of two distinct elements: the photoresist coater and the development and surface conditioning unit. The photoresist coater delivers uniform and reproducible wet-film thickness processing on the wafers through a high-velocity spraying process. The machine is equipped with multiple dispense heads, allowing users to select the most optimal solution for their needs. It utilizes a proprietary gas pressure control tool, and provides accurate consistency, thickness, and film uniformity in both pre-cleaning and post-clean operation. The development and surface conditioning asset features four proprietary patented processing modules. It has a dual-tank photoresist developer which provides complete control over the development process. The model also has a bubble-removal agitation and a rinsing module that ensures the production of consistent and uniform films. Combined with the surface conditioning module, the equipment provides an integrated solution for the production of high-quality precision devices. SEMITOOL Sirius provides a wide range of features and capabilities for the production of high-quality photoresist films. Its quick and precise processing time enables chip manufacturers to make reliable devices with reduced cycle times. Its integrated control system provides greater control over the wafer's surface topography during processing. The unit also has the ability to manage multiple coating materials in one single operation, and provides comprehensive process validation, troubleshooting, and data log management tools. Overall, Sirius is an ideal photoresist machine for a wide range of leading-edge semiconductor device fabrication processes. It provides excellent uniformity, accuracy, and reliability in the production of high-quality photoresist films. Its integrated modules and controls ensure accurate, repeatable processing and enable users to save time and cost during the manufacturing process.