Used SEMITOOL Spectrum #9124180 for sale

SEMITOOL Spectrum is a equipment designed for photoresist processing of semiconductor and integrated circuit products. The system is designed to bridge the gap between the performance and cost of wet bench systems and in-house, dedicated photoresist processors. The unit offers a wide range of functionality and features that make it suitable for a variety of applications. Spectrum includes a two-stage batch oven and two custom-designed powder modules, with additional features such as a varistor, hydrocarbon-free tunnel, and an additional 5cm for increased accuracy and throughput. The machine has a low temperature range of 39-600°C, a controlled nitrogen atmosphere and can hold up to 20 wafers per batch oven run. The tool offers a choice of programmable options, enabling customers to customize the asset to meet individual needs. This includes a solution profile, per-sequence settings, in-situ electric field tuning, diffusion control and non- volatile memory. The model is designed for high-precision, high-temperature photo-resist coating performance. It offers an accuracy of 0.5 µm, with 0.02µm step size resolution and dynamic resolution settings to enable accurate process control. Additionally, the equipment has a uniformity of temperature of less than ± 0.3°C across the wafer and chamber. SEMITOOL Spectrum's features also benefit from its advanced diagnostics and maintenance features, which includes process and chamber diagnostics, along with predictive maintenance, which helps minimize downtime. The system is has also been designed with safety in mind. It has built-in interlocks, which protect operators from injury due to hazardous materials, as well as pressure and vacuum relief systems. Additionally, the unit's documentation library provides support for operators to diagnose problems. Spectrum is a reliable and efficient machine for processing photoresist for semiconductor and integrated circuit products. Its features make it a great cost-effective choice for its users.