Used SEMITOOL Spectrum #9355653 for sale

SEMITOOL Spectrum
Manufacturer
SEMITOOL
Model
Spectrum
ID: 9355653
Spray cleaning system, 8" Process: Polymer clean.
SEMITOOL Spectrum is a photoresist equipment designed to combine both chemical and physical processes with chemical vapor deposition (CVD) to create a flat, uniform thin-film of photoresist on a variety of substrates. It is designed as an all-in-one platform for thin-film deposition, planarization, and resist removal. The system utilizes radio frequency (RF) plasma to initiate chemical reactions for optimal resist coverage, thickness and uniformity. Spectrum is designed to accommodate multiple substrates including silicon wafers, optical glass, gallium arsenide, and ceramics. In addition to the RF plasma source, it also features a vacuum chamber, high-performance mass transfer equipment, and control systems for process monitoring and control. The unit uses a combination of CVD and photo-etching to deposit thin-film photoresist uniformly and accurately on the substrate. The RF plasma initiates the chemical reactions that create a flat and uniform film of photoresist on the surface. The plasma also helps to eliminate voids, scratches and residue that could affect the performance of devices. Once the thin-film is applied, the substrate is then transferred to the planarization stage where the film is made level and smooth. The planarization stage utilizes an etch process to remove any residue or irregularities on the surface. The substrate is then placed in a vacuum chamber where the photoresist is cured, creating a uniform and consistent thin-film over the surface. The substrate is then ready for resist removal. This can be done with either wet etching or laser ablation. Wet etching uses a series of chemicals to dissolve the photoresist from the surface. Laser ablation employs a specialized laser to gently evaporate the photoresist from the surface. Finally, the substrate is tested to ensure that the substrate is suitable for device manufacturing. This is done by running an electrical test on the device to ensure that the device will function properly and that the device is free from defects. SEMITOOL ensures that all devices that pass the test are ready for commercial use. SEMITOOL Spectrum is a highly efficient and precise photoresist machine that is designed to provide high-precision devices with uniform, consistent and reliable coverage. It is ideal for use in applications requiring a uniform photoresist layer on the substrate while ensuring optimal performance of the resulting device.
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