Used SEMITOOL SRD 880 #9248598 for sale

SEMITOOL SRD 880 Photoresist Equipment is a complete integrated photolithography system designed for process control in the processing of advanced semiconductor devices. The unit is designed and built to meet the most stringent requirements for precision, repeatability, and reliability in semiconductor photoresist processing. The machine includes a chamber with a unique, two-door, roll-in design providing easy access to the interior for maintenance and chamber service. The process chamber features an integrated spin/spray tool, multiple isolation valves, an automated shutter controller, two level-balanced and contaminant-free surfaces, and a motorized load-lock. The asset also features a super-clean, HEPA-filtered exhaust model, plus an independent recipe-based process controller designed to maximize both yield and throughput. The photoresist processing is done in SRD 880's uniquely designed roll-in chamber which has an integrated spin-spray feature. This makes it possible to spin and spray multiple wafers in a single batch without compromising on throughput. The chamber also has a unique isolation valve equipment that helps keep the process chamber free of contamination. With two level-balanced and contaminate-free surfaces, the system ensures that each wafer is processed at the same level of exposure. The automated shutter controller is designed to give precise control over wafer exposure. It is also capable of performing accurate and repeatable timing of wafer exposure. The shutter controller works in conjunction with the process controller to provide a high level of process control and efficiency. The process controller is a recipe-based unit that allows for the quick and accurate programming of photoresist processing. It is designed to give consistent results for each wafer, even as environmental and processing conditions change. The process controller is fully programmable and can be set up for multiple processes and recipes. This allows it to achieve both high-yields and high-throughputs. SEMITOOL SRD 880 Photoresist Machine provides precise control and reliable performance for advanced photolithography processes. With its integrated spin/spray tool, multiple isolation valves, automated shutter controller, two level-balanced and contaminate-free surfaces, and recipe-based process controller; the asset helps improve semiconductor device manufacturing yields while reducing cost and time in the photolithography process.