Used SEMITOOL SRD #9292696 for sale

SEMITOOL SRD is a photoresist equipment used for chemical-mechanical polishing or chemical mechanical planarization (CMP) of substrates including wafers, disks, and other flat panel electronics. It is a compact system with integrated processing capabilities that includes a process chamber, polishing pad, and polishing disk. The unit can process a variety of materials such as silicon, gallium arsenide, silicon carbide, and polyimide. SRD has an automated wafer handling machine, with recipe-based programming allowing for a high degree of process control. It is designed to handle a range of wafer sizes from 8 to 300mm, with an adjustable process chamber height from 4" to 45". SEMITOOL SRD has two main components: a Multi-Disk Mechanism (MDM) and a Planarization Process Chamber (PPC). The MDM utilizes a multi-disk assembly with an adjustable velocity to perform the polishing process on the substrate. This includes diamond-embedded, flexible polishing pads, and a variety of chemistries designed to enhance process performance. The PPC is the area in which the polishing action takes place. It includes a process chamber, lid, and pre and post-polishing rinse systems. In addition, it provides a precise control of process parameters including flow rate, temperature, slurry velocity, and pressure. The main feature of SRD is its variable speed polishing, which allows the polishing process to be optimized for a wide variety of substrates and chemistries. SEMITOOL SRD also has a manual cleaning feature for maintaining a clean polishing environment and a wafer cleaning tool for routine maintenance. The asset can be operated remotely via a distributed control model, allowing for remote tracking and monitoring of process flow and progress. SRD has become a popular option in the CMP industry due to its process flexibility and advanced process anomalies in real-time. The equipment is designed to prevent defects and provide a high degree of uniformity and control, ensuring consistent product quality. SEMITOOL SRD is a great option for anyone looking for a chemical-mechanical polishing system with reliable performance and flexible process capabilities.