Used SEMITOOL SST 421-280 #9351561 for sale

SEMITOOL SST 421-280 is a photoresist equipment used for microfabrication processes in the semiconductor industry. It is a fully automated wet bench system which combines a short process cycle time with high process quality assurance and minimal operator input. This unit is suitable for processing wafers up to 8 inches in diameter and contains a single cassette to cassette substrate stage for processing a range of substrates from silicon to hardened metals. SEMITOOL SST-421-280 has eight reagents for processes such as developers, etchants, neutralizers, and removers. It is designed with a modular-based machine controller, allowing for rapid changes in the settings and process parameters. The tool is also capable of integrating with other processes such as spin-rinse drying and plasma processing. Additionally, the asset provides a full suite of diagnostics such as temperature and cycle count monitoring. SST 421-280 is equipped with the automated end point detection model (EPD) which allow for accurate chemical process control. This equipment combines the benefits of both a thermal stage and photo detector to monitor the surface resistivity of the wafer in real-time. Additionally, the system provides an optical datalogger which records the cycle log and parameters to allow for process traceability. Finally, the unit is also equipped with a conveyor which provides both single wafer load and unload as well as the capability of batch loading. The conveyor also allows for very precise positioning of wafers prior to etching and ashing processes in order to ensure the highest possible yield. SST-421-280 is an advanced photoresist machine designed to provide high process quality assurance and flexibility in a wide range of applications for the semiconductor industry. With its automated end point detection tool, conveyor and a full suite of diagnostics, the asset enables precise and cost-effective fabrication processes.