Used SEMITOOL SST 421 #9229861 for sale

SEMITOOL SST 421 is a Photoresist Equipment manufactured by SEMITOOL that is an ideal solution for efficiently preparing substrates for optical lithography and other steps in semiconductor device fabrication. This system features a four-station single cabinet configuration that allows for the simultaneous processing of four 6", 8" and 12" round wafers for increased throughput. The systems' modular design allows for the integration of SEMITOOL Triline/Pilot Resist Filtration Unit (RF-0320) and Triline/Pilot Dispensing Machine (DPT-0320). Additionally, SEMITOOL SST-421 provides users with a wide range of pre- and post-developing baking options, as well as process recipe capabilities. SST 421 features an ergonomic design, with both manual mechanical and automatically moving parts enabling precise and repeatable bath geometry. SEMITOOL Accudepth Technology precisely meters resist concentration and temperature to ensure uniform film thickness and repeatability across multiple projects. This tool also features an integrated resist temperature control asset with an integrated circulation heater for consistent resist temperature data and repeatability. SST-421 provides users with many features including a 16" max substrate size, single-coat step and repeat with no physical mask change, multiple development options such as conventional manual developing tanks and a four-pocket tank, both designed for max efficiency, as well as variable sipe widths and adjustable peel cycles. The model also features an auto-diagnostic function that helps eliminate the need for manual maintenance. SEMITOOL SST 421 offers users a number of benefits, such as its unique design which is designed to save operators time, and its compatibility with a range of resists. The equipment features maximized process flexibility with its wide range of pre- and post-developing baking operations, as well as its accurate control of resist temperature and concentrations which result in superior repeatability and performance. Additionally, SEMITOOL SST-421 features both manual mechanical and automatically moving parts to help reduce chemical consumption. This system is therefore ideal for a wide range of processes, from low to high volume implementations.