Used SEMITOOL SST 421 #9379925 for sale

SEMITOOL SST 421 is a photoresist batch processing equipment designed for making integrated circuits on semiconductor wafers. It is optimized for processes used in advanced memory, logic, and other complex IC technologies. SEMITOOL SST-421 is designed for highest device yield, reduced cycle time, and automated configurability. It uses proprietary Ultra Process Technology-UpTech™, a combination of advanced algorithms, integrated process modules, and quick-change throughput features. These allow the tool to achieve increased throughput with reduced cycle times. SST 421 consists of an integrated, modular platform. The four major components are an integrated chemical delivery system, a thermal transfer chamber, a substrate positioning unit, and an onboard controller. The integrated chemical delivery machine consists of four independently controlled, air-conditioned chemical tanks connected to a pump tool. The chemical tank configuration available for SST-421 is customizable for each unique process. The asset includes multiple pumps and filters necessary to deliver different chemistries such as photoresist, developers, and etchants. The thermal transfer chamber is designed to provide uniformity of process temperature across the wafer surface. This chamber utilizes a built-in model of heaters and fans that can be adjusted according to the process requirement. The substrate positioning equipment is a wafer handling unit with five individually controllable axes of motion. This allows for accurate alignment and positioning of the substrate during the process. The system also includes a robotic arm to pick-up and transfer substrates to and from the chemical tanks. The onboard controller is a custom controller built for the tool which provides users with an intuitive user interface. This controller allows users to program and modify recipes. The controller can also monitor real-time process parameters. The controller can be linked via a network to enable remote control. SEMITOOL SST 421 is an innovative photoresist processing unit designed for high-volume, high-accuracy production of semiconductor devices. It combines advanced algorithms, integrated process modules, and quick-change throughput features to deliver increased throughput and decreased cycle times. Its modular architecture provides configurability, while its onboard controller ensures intuitive,curable operation.