Used SEMITOOL SST-742 #9229862 for sale
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SEMITOOL SST-742 photoresist equipment is a specialized large area photoresist coater, whose design is optimized for providing high throughput, reliable uniform coatings. The photoresist system features a patented, dual-level spray technology, which allows for superior coating uniformity and deposition control. The integrated temperature control unit further ensures a consistent coating both across the surface of the substrate and from substrate to substrate. This enhanced control results in a repeatable and reliable uniform coat of photoresist. The machine of SEMITOOL SST 742 consists of a main chamber and four satellite chambers. The main chamber is a deep, rectangular, stainless steel box consisting of an overhead spray chamber, a plenum, and a heated chamber wall. The four satellite chambers, independent of the main chamber, also make up the coating tool. Each satellite chamber is connected to the main chamber plenum. The entire asset is further controlled by an advanced integrated controller allowing for both temperature and process parameter control. The spray process of SST-742 consists of a spray methodology optimized for uniform deposition onto large substrates. A custom designed spray gun operates inside the spray chamber, automatically sweeping the substrate with the photoresist solution while providing a fast response and precise control of the resultant uniformity. The substrate is then placed into the heated chamber. This chamber has a variable temperature heated wall which operates at temperatures between 90°C (194°F) and 160°C (320°F), allowing for optimisation of the coating performance for any photoresist product. The control software for SST 742 allows for a large range of process parameters to be set, such as dwell time, temperature, nitrogen flow, and gas pressure. Also included is a recipe editor, which allows for easy set-up for different photoresists. SEMITOOL SST-742 photoresist model is versatile and therefore can fulfill a variety of application demands such as metal liftoff or solar cell encapsulation.
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