Used SEMITOOL SST-742 #9356936 for sale

SEMITOOL SST-742 is a photoresist equipment that efficiently and accurately processes semiconductor substrates. This batch-type platform consists of an overflow rinse, hot DI rinse, center load, spin dryer, track transfer, pre-bake, aligner, auto e-beam lithography, post-bake, develop and track unload. It is designed to offer superior process reproducibility, a wide range of process capabilities, and user friendly operation. The overflow rinse can process from 35 to 200µm-sized substrates, as well as chip on board, probe cards, and substrates with height up to 20mm. The hot DI rinse facility requires only a single supply of clean DI water at up to 95°C. A single header can be used to supply up to 4 rinse tanks, thus allowing the flexibility to choose the level of particulate removal needed. The center load is designed to hold the substrates in position, while the spin dryer removes any residual water left on the wafers after the DI rinse. The track transfer is responsible for transporting the wafers from the center load to the alignment stage. Here, the wafer's position accuracy is maintained with an accuracy of 25µm. Afterward, the pre-bake is used to apply the photoresist, while the auto e-beam lithography is used to expose the photoresist. The post-bake then completes the application of photoresist, while the track unloads the wafer as it moves along in the system. Overall, SEMITOOL SST 742 is a comprehensive photoresist unit that provides a wide range of process capabilities and reliable process reproducibility. Its ergonomic design offers optimal operator safety, while the machine's automation improves process throughput and eliminates the possibility of misalignment. The tool is ideal for the industrial production of high performance substrates and semiconductor devices.