Used SEMITOOL SST-C-421-280 #293747945 for sale
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SEMITOOL SST-C-421-280 is a photoresist equipment designed to meet the most demanding requirements of the semiconductor industry. This system utilizes a cold plate module, conformal cooling, and thermal sensing technology to provide an ultra-precise and reliable surface resistivity layer. The cold plate module works by circulating a chilled coolant directly over the substrate during processing, keeping the area uniform and ensuring a consistent photoresist layer. The unit allows up to 10.5 SFM/min of stationary pressure and 28.1 CPI (contact points per inch) at the highest pressure. The conformal cooling increases uniformity of the photo-resist surface layer, increasing both speed and accuracy of the process. This technology takes the shape of the substrate into account for better evenness and quicker turnaround time. The machine is equipped with a thermal sensing set-up that enables the user to have complete control over the substrate's surface temperature. It has a ±0.1 °C accuracy, and a resolution of 0.01 °C, allowing for greater precision and predictable results for any application. Other features of the tool include a user-friendly software with intuitive icons, adjustable tank capacity up to 244 L, and a built-in E-Beam plate pre-rinse and post-rinse phases. The software also alerts users of process abnormalities and enables them to modify tank settings at any time, while providing real-time reports of all process parameters. Overall, SEMITOOL SSTC421280 photoresist asset provides high performance, compliance, and excellent uniformity, making it the ideal solution for challenging semiconductor and device manufacturing applications.
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