Used SEMITOOL SST-C-621-270 #9177160 for sale

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Manufacturer
SEMITOOL
Model
SST-C-621-270
ID: 9177160
Wafer Size: 3"-4"
Vintage: 1995
Batch solvent spin rinse dryer, 3"-4" Cassette Pumps / Tanks 1995 vintage.
SEMITOOL SST-C-621-270 is a photoresist equipment developed for semiconductor applications. It is designed to be used in a wide variety of process flows that involve processing wafers with photoresists. The system offers high process repeatability, high throughput and reliability, and low maintenance requirements. The unit consists of a 621-channel electrically controllable dispense manifold that provides precise and accurate flow rate control. This allows strict process control of chemicals delivered to the wafer surface. A process chamber enables the simultaneous loading of wafers and a single-piece quartzboat for mass transport of chemicals into the machine. The tool is also equipped with dual temperature control modules to enable precise temperature control of photoresist solutions and to minimize variability in the processes. The asset also features a 270-position spin chuck which provides a stable platform for performing precision processes, including spin coating, pre-soft bake and post-develop. A UV lamp located above the vacuum chuck is used to rapidly dry the photoresist layers. For safety, the model includes an Emergency Off (EO) and on-board exhaust equipment to control the release of any hazardous airborne particles. Last, but not least, SST-C-621-270 has a Graphical User Interface (GUI) to enable users to view and control the system. The GUI makes the unit easy to operate and allows users to quickly set up and monitor the machine to optimize their process. In conclusion, SEMITOOL SST-C-621-270 is a highly efficient, reliable, and user-friendly photoresist tool that enables precise and accurate processing of wafers with photoresists.
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