Used SEMITOOL SST-C-632-280-KM #9276685 for sale

SEMITOOL SST-C-632-280-KM Photoresist equipment is a complete wet bench cleaning and photoresist processing solution for device fabrication requirements. It is designed to automate the wafer preparation, substrate cleaning, photoresist coating, and development processes, while maintaining complete process control. The system features automatic substrate transport and a modular, user-configurable sequence of process steps. SST-C-632-280-KM cleaning unit consists of multiple rinse tanks, a surfactant cleaning module, DI water rinsing, and a process stand for aqueous or solvent-based cleaning. The automated rinse tanks feature a peristaltic pump machine that quickly fills and drains the tanks, while providing performance feedback to the operator. The surfactant cleaning module is designed to clean the substrate surfaces with a combination of acid, alkaline, and amine surfactants. The DI water rinse provides ultra-pure rinse water for a final clean. The tool also includes a resist coater for applying the photoresist material to the substrate surface. The coater is designed for repeatable, uniform resist coatings with a range of thicknesses. It can be configured for spin coating, spray coating, or cascaded spin-coat processes. The coater features advanced temperature and flow sensors to maintain process control. The development asset includes integrated hot plates for pre-bake and post-bake, a rinse and dry station for removing residual photoresist from the wafer, and a high-accuracy temperature and humidity controlled track for critical development steps. A flexible, user-configurable sequence of development processes can be set up for optimization of process control. SEMITOOL SST-C-632-280-KM photoresist model is designed for work flows using leading resist materials, and is fully compatible with existing and new photomask equipment. It offers an easy to use interface with pre-programmed process sequences, along with the ability to create custom process sequences. The equipment provides a reliable platform for achieving repeatable, high-quality device fabrication results.