Used SEMITOOL SST-C-6422-5060-U #9279869 for sale

ID: 9279869
Vintage: 2002
System TREBOR Magnum 610 pneumatic pump 2002 vintage.
SEMITOOL SST-C-6422-5060-U is an advanced photoresist equipment designed for high-volume production of integrated circuit wafers and substrates. The system combines an advanced high throughput platform with reliable long-term processes and tight process control, allowing for consistent and repeatable production. SST-C-6422-5060-U photoresist unit includes a fully-automated, integrated configuration with advanced process controls to monitor and adjust settings in real-time. The machine has an integrated 400mm process boat with 50-chamber capacity which allows for a maximum of 400mm substrates or wafers to be processed. This makes it ideal for high-volume production of substrates or wafers with high precision and repeatability. The tool uses a patented dual-zone platform design which allows for two independent processes to be executed simultaneously, providing maximum process efficiency and throughput. This dual-zone design includes a high-temperature zone with a top temperature of up to 915°C and a low-temperature zone with a top temperature of 190°C. The two different temperature zones, combined with advanced servo-drivers and temperature controllers, ensure accurate and repeatable position-oriented baking of the substrate or wafer. The photoresist asset also includes a vacuum model with two stages that control both bake-respite and solvent vapors; a choice of ablative or soft-ablative processes; and a proprietary mask-attached chamber equipment that provides precise, repeatable processes. SEMITOOL SST-C-6422-5060-U also includes a high-resolution imaging subsystem with selectable scan speed and optical filters for accurate, fast alignment and detection capabilities. SST-C-6422-5060-U comes with advanced process control software that allows for real-time adjustments to parameters such as chamber temperature, pressure, and rate of spin. The integrated software provides onsite personnel with up-to-date performance metrics to monitor process effectiveness and stability. This allows for reduced downtime, decreased scrap, and improved process repeatability. Overall, SEMITOOL SST-C-6422-5060-U Photoresist System is an ultra-high throughput production platform that is designed to provide consistent results with improved process repeatability and control. The unit's patented dual-zone platform supporting up to 400mm wafers combined with the integrated vacuum machine, advanced servo-drivers, and process control software provide increased throughput for higher-yield turnouts.
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