Used SEMITOOL SST #9359467 for sale
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SEMITOOL SST is a state-of-the-art photoresist equipment developed by SEMITOOL, Inc. The system is an automated photoresist coater that provides high precision, accurate, and repeatable resist coating and stripping. It makes use of advanced technology, including vacuum deposition and advanced optical process control, to provide the best possible results. The unit consists of three main components: the chamber, the compressor, and the computer machine. The chamber is constructed of stainless steel. It consists of two chambers, one for the vacuum chamber and another for the film deposition area. An integrated high-precision sputter deposition instrument controls the film deposition process, allowing precise control of the deposition rate and layer uniformity. The compressor pumps air into the various parts of the chamber, creating a vacuum. This vacuum allows a homogeneous atmospheric environment throughout the chamber, ensuring uniform film and resist deposition. A computer-controlled tool is used to monitor the vacuum levels and adjust them accordingly. The asset also makes use of advanced optical process control to ensure accurate, consistent, and repeatable resist coating and stripping results. This is achieved by using a spectral reflectometer and a spectrophotometer to measure the optical properties of the resist coating and substrate. In addition, the model is also capable of performing online non-destructive testing (NDT) of the resist layer to determine its uniformity, adhesion, and thickness. This is achieved through an optimized scanning equipment that scans the resist layer at a very low energy level. Finally, the system also provides post-process analysis to confirm the coating and stripping results. Furthermore, the unit is equipped with a number of automated processes to ensure accuracy, efficiency, and repeatability of the deposited resist layers. Overall, the advanced engineering provided by SST makes it a highly efficient and reliable option for photoresist coating and stripping. This machine offers a wide range of advantages, such as precision, accuracy, consistency, repeatability, and ease-of-use.
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