Used SEMITOOL ST-2400 #293600511 for sale

Manufacturer
SEMITOOL
Model
ST-2400
ID: 293600511
Spin Rinse Dryer (SRD).
SEMITOOL ST-2400 is a photoresist submerging equipment designed for semiconductor device manufacturing. It utilizes a vacuum-based approach for transferring photoresist from a storage container to a wafer. ST-2400 system is capable of controlling photoresist level and temperature to ensure uniformity and accuracy during wafer processing. The unit consists of a dispense valve and controller responsible for driving the motion of the wafer during photoresist submerging, along with a nozzle, a heating block that maintains a fixed temperature, and a vacuum generator that is responsible for removing air gaps during photoresist submerging. SEMITOOL ST-2400 machine is capable of a variety of photoresist substrate configurations and can process multiple substrates simultaneously. It can be used for both contact and non-contact photoresist submerging, allowing a variety of process recipes to be implemented. Additionally, it can be customized to accommodate a range of photoresist viscosities, temperature, and submerging heights, enabling it to attain uniform photoresist coverage over the entire wafer. ST-2400 tool is equipped with closed-loop process control for monitoring photoresist level, temperature, submerging height, and other process parameters. Furthermore, the asset has a built-in fault recovery capability which can identify and eliminate model errors. Additionally, it has an advanced vacuuming capability which removes any trapped air bubbles in the photoresist layer, improving overall process performance. The equipment is compatible with a range of liquids, such as photoresists, solutions, mixtures, and emulsions, allowing for broad compatibility with existing coating processes. Furthermore, it is capable of producing exceptional film performance thanks to its precise substrate control and advanced dispense technologies. In summary, SEMITOOL ST-2400 is a reliable and robust photoresist submerging system which offers a wide range of advanced features, such as precise processes control, fault recovery, precise substrate control, and compatibility with a range of liquids. These features, combined with its reliable nature, make ST-2400 an ideal unit for semiconductor device manufacturing applications.
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