Used SEMITOOL ST 240D #131147 for sale

Manufacturer
SEMITOOL
Model
ST 240D
ID: 131147
Rinser dryer.
SEMITOOL ST 240D is a comprehensive photoresist equipment designed to serve the photolithography needs of the semiconductor industry. It is equipped with a number of advanced features that allow it to provide precision patterning capabilities and precise control over etch times. The physical characteristics of the system include a 16.7" x 16.7"/42.6 cm x 42.6 cm chamber with a depth of 10"/25.4 cm. It has an Orientation Station and can be used with both liquid and dry photoresists, providing the most flexibility for different process requirements. It also has a direct heating mechanism for the resist solution which allows for rapid ramp-down profiles and precise adjustment of resist temperatures. Other features of the unit include a controllable gas injection machine for optimized volume and temperature control, as well as a humidity control tool designed to improve repeatability and throughput. The asset also utilizes advanced imaging technologies such as full HD optics, advanced light mapping, and automated stage control for precise alignments and overlay. ST 240D also comes with a suite of powerful processing capabilities including a range of exposure methods such as optical, laser, laser scanning and digital imaging, as well as advanced resist control capabilities, which allow for precise control over the resist thickness and hardness. In addition, the model provides a host of time-saving features such as a built-in, automated cleaning station, a streamlined single-step process cycle, and full integration with common automation, including SMIF, ARM, and SMCS systems. In summary, SEMITOOL ST 240D is a powerful and versatile photoresist equipment that is designed to provide precision micron-scale patterning, high throughput, and precise etching and resist control. With a range of advanced imaging technologies, flexible gas control, and automated cleaning station, ST 240D is an ideal choice for industrial photolithography needs.
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