Used SEMITOOL ST 2600 #9216873 for sale

SEMITOOL ST 2600 is a photoresist equipment designed for both stand-alone and integrated processing for 300mm production. This system is built with modular parts for straightforward repair and maintenance to reduce downtime. It is equipped with an array of automation and safety features that make it an ideal solution in Chip Scale Packages (CSP), SiP and 3D packaging. ST 2600 features a nanoscale resolution manual beam scanner with a repeatability of less than 1µm for precision alignment and track exposure. It also has the option to install an auto-alignment unit for extended lithography and testing. Its single-pass exposure eliminates shadowing caused by multiple-pass with stencil masking technique. This greatly reduces pattern limit and defect yield due to optical aberration of previous masking technique. The 350nm 365nm UV lamps of SEMITOOL ST 2600 machine offer an adjustable energy output and a high-contrast resolution with efficient exposure of any patterns having a wide range of shapes and sizes. The tool boasts of high durability and long lifetime. The Photoresist Stripper reduces etching time and increases facility throughput. The standard nozzle configuration allows for uniform resist coating with the rotating shower head application. ST 2600 asset integrated with Nanotech's software integrates process control, data acquisition, and product monitoring. It can be interfaced with optical and proximity metrology products for in-situ resist film thickness measurements. Furthermore, the automated model incorporates all predetermined programs with intelligent process control for repeatable precision. The Temperature controller provides precise control over the resist unit temperature. The unique, integrated air pulse cleaning mode reduces program cycle time, eliminates water, and solvent usage. SEMITOOL ST 2600 can pattern up to 69 " diameter wafer with a maximum of 8" per wafer using the uniform exposure feature. It also offers environmental safety features by incorporating a filter on exhaust air for purification and recycling of air with CO2 monitoring equipment. In conclusion, ST 2600 is a robust and reliable photoresist system. It is easy to maintain and has excellent repeatability with a high degree of safety. This unit is engineered to provide the highest precision and productivity in the most economically efficient manner.