Used SEMITOOL ST 260D #105445 for sale

SEMITOOL ST 260D photoresist equipment is a tool for etching and cleaning integrated circuits on various substrates including silicon and quartz. SEMITOOL ST-260D is a high-performance spin coater featuring a modular design for easy access to all components of the system, including a spin head, vacuum, abra-sion, and cleaning sections. The unit features a stainless steel spin head which can accommodate large substrates upto a diameter of 12.7". This allows the substrate to be uniformly and continuously spun at variable speeds. To help ensure a uniform and consistent film thickness, the spin head is equipped with a motorized variable speed controller. The spin speed can be set up to 1,800 RPM. To apply photoresist to the substrate, ST 260 D offers an integrated vacuum machine. This tool includes a unique roll-in cassette for easy loading and unloading of the substrate. Once loaded, the substrate is exposed to a vacuum, which helps to draw the photoresist onto the surface. The vacuum asset also features a built-in capacitance level control. This ensures that the substrate surface is correctly charged prior to application, which helps to reduce any issues with resist adherence. For etching and cleaning, ST-260D has both wet and dry processing capabilities. It is equipped with an abrasive particle silo with aggressive cleaning settings and four immersion vats. This allows the substrate to be etched and cleaned with fewer process steps. The model also includes an automated wafer transfer equipment and a pre-culture chamber which help to reduce resource costs and turnaround times. ST 260D photoresist system is designed to provide maximum process flexibility while helping to reduce processing costs. Its modular design makes it easy to maintain and upgrade the unit, and its automated processes help to reduce manual labor and errors. With its extensive range of features and capabilities, SEMITOOL ST 260 D is an ideal solution for various IC fabrication processes.