Used SEMITOOL ST 260D #131148 for sale
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SEMITOOL ST 260D is a photoresist processing equipment used for the development and cleaning of integrated circuits (ICs). It is designed for both wet processes and plasma processes in order to achieve superior photoresist lifecycle management. The system offers optional laser alignment for precise placement of resist mask images on an IC, as well as dual cassette loading for rapid substrate processing. The unit uses a multi-stage rotor for process precision and uniformity, with a modular approach allowing for bulk and single wafer capabilities. An adjustable resistance machine further improves process yield and control. The tool also features an integrated overhead structure with function-specific components including graphic user interface (GUI), touch screen interface, and sensor-based control. The high-density, integrated processor includes laser alignment and dual-cassette loading, optimized resist lifecycle management, automated recipe development, wet chemical and electro-chemical-mechanical polishing processes, laser trimming, and laser annealing. An adjustable multiple-layer photoresist architecture also optimizes wafer coverage and process precision, while a temperature-controlled Spin/Spray process eliminates chemical exposure to the operating environment. A modular vacuum asset with load/unload ports ensure high-speed, low cost resist disposal, and chemical management ports improve process control and contain chemical exposure. The model also offers multi-level access control, with centralized control of cross-functional users and vendors, allowing for faster and more efficient communication within the equipment. SEMITOOL ST-260D is designed for high reliability, cost efficiency, and ease of use. It simplifies the process of photoresist processing, allowing manufacturers to maintain consistent product quality, reduce reject rates, and maximize system yields. In addition, the unit is designed to be highly reliable and carefully crafted to provide maximum performance and efficiency for the IC industry.
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