Used SEMITOOL ST 470 #9207419 for sale
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SEMITOOL ST 470 is a powerful, full-featured photoresist equipment designed to provide a wide range of precise coating, developing, and stripping services. This system is perfect for fabs fabricating on both rigid and flexible substrates. ST 470 is equipped with a scanning electron microscope (SEM), photoresist coater, integrated precursor unit, and spin processor for optimal control and precision over the photolithography process. The machine's SEM allows for very detailed examination of specimen surfaces allowing for dynamic control of the photomask shape, size, and other processing parameters. This is used to ensure precise interfacing between the semiconductor device, the substrate, and the photomask. The high-resolution, optical microscope can also easily determine substrate flatness, as well as providing a quick diagnostic and verification of the photolithography success. The integrated precursor tool offers precise delivery of photoresist or developer, allowing for greater accuracy and control over both the development time and process. This asset includes an internal reservoir for the chemicals, as well as a smart chip that keeps track of the amount of liquid used to save time and reduce waste. Furthermore, the SC 470 holds both a spin processor and an automated developer employing automatic delivery of developer solution across the specimens. This ensures that the develop time is always consistent and accurate for uniform results. SEMITOOL ST 470 also contains a highly accurate hot plate, allowing for precise real-time adjustment of temperature for optimal performance of the resist film. The hot plate works in conjunction with the model's integrated air cooling to provide precise temperature control enabling precise process and film thickness control, even on challenging substrates. The equipment also employs a FOUP load/unload system that automates the movement of wafers, saving time and effort. The FOUP load/unload unit is also equipped with an organized wafer tray with integrated sensors for automated monitoring and preservation of wafer position within each group. ST 470 is an advanced photoresist machine offering superior accuracy and control for all photolithography processes. With its array of features, this tool can provide more efficient and repeatable processing for thin-film semiconductor devices of any size.
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