Used SEMITOOL ST-480 #9156435 for sale

Manufacturer
SEMITOOL
Model
ST-480
ID: 9156435
Wafer Size: 8"
Spin rinse dryer, 8" Resistivity controller P328 controller.
SEMITOOL ST-480 is a photoresist processing equipment suitable for use in a variety of industrial and academic applications. This system offers a range of integrated components for the development, processing, and characterization of photoresist materials. The unit is composed of an automated robot transport mechanism to ensure precise movement and positioning during photoresist processing. Its precision motion controller ensures repeatable results among multiple processes due to accurate repeatability. In addition, the robot is programmed to automatically adjust the temperature and speed required for the desired output. The machine's development and processing capabilities includes a range of resist types for creating films and layers of specific thicknesses. It uses a spin coating process to evenly and precisely introduce the photoresist onto the substrate. Meanwhile, the process station is equipped with substrate clamps and an autostop to protect the substrate from over-processing. The characterization station includes a variety of imaging and analysis components for assessing the quality and accuracy of the process results. It features a surface profilometer for measuring micro-roughness and uniformity on the photoresist layer, plus a spectrophotometer for measuring optical properties of materials. The integrated optical microscope component is ideal for visualizing the process results. This comprehensive photoresist tool allows users to customize their photoresist processes for creating and analyzing layers, as well as for potential applications in materials research and prototyping. The modular design and integrated components of ST-480 offer users the capability to perform highly precise photoresist processes with reliable repeatability.
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