Used SEMITOOL ST 860 #293622249 for sale

SEMITOOL ST 860 is a state of the art photoresist equipment designed to provide quick, repeatable, and reliable process results with minimal production interruption. This system is particularly well suited for high-end, high-volume applications like LCD and MEMS production, as well as research and development projects. The basic architecture of ST 860 includes a two-bay automatic track, two wafer cassettes, two shipper cassettes, two high-performance process chambers, and two high-temperature flat-plate bake modules. The two tracks are supported by a single microprocessor-controller embedded in the unit. This allows the operator to quickly and easily program the machine from any standard web browser. Furthermore, an optional stand-alone thermal control tool ensures precise, repeatable thermal process results. The integrated motion and drive asset is designed to offer an unprecedented level of accuracy and repeatability for photoresist applications. This model is composed of linear motors, ball screws and linear encoders for easy positional alignment, and advanced stepper motor technology for smooth speed control. This ensures not only repeatable process results, but also reduced cycle time from start to finish. The two high-performance process chambers in this equipment are designed to ensure consistent and reliable process results. Both chambers are capable of accepting three different sizes of substrate and are highly temperature insensitive, providing more consistent processing results over a wider range of operating temperatures. The two high-temperature flat-plate bake modules use advanced temperature control technology to ensure a uniform temperature distribution over the full surface of the substrates being processed. Furthermore, SEMITOOL ST 860 includes optional sensor feedback and monitoring systems that allows continuous monitoring of both process parameters and the status of the system. This ensures fast and easy adjustment of process parameters and virtually eliminates any risk of operator error. This unit is also fully compatible with SEMITOOL SPTSO automated process software and offers extensive backend reporting functionalities. ST 860 is designed for use in cleanroom environments and is manufactured to stringent ISO 9001 and SEMI C002 standards. With its advanced design, robust construction and intuitive operation, SEMITOOL ST 860 is sure to meet the needs of the most demanding photoresist applications.