Used SEMITOOL ST-870 #9188736 for sale

SEMITOOL ST-870 is an innovative Photoresist Equipment that delivers superior performance for high-volume photoresist applications. This precision engineered, semi-automated system utilizes a direct drive spindle and superior alignment capabilities to accurately manipulate wafers for precise repeatable process results. SEMITOOL ST 870 offers a wide range of features such as an automated spin speed control, advanced edge- Gripping Plates, stackable Process Cassettes, four-pocket and dual-lane chemistry distribution, and more, allowing for improved control over spin speed, fluid delivery, and substrate handling. ST-870 is equipped with a wafer edge cleaning unit that delivers incredibly clean substrates, enabling better quality photoresist results. To achieve better substrate alignment, ST 870 deploys laser alignment technology and an onboard non-contact edge sensor that accurately identifies wafer edges. The Machine also features a Micro Rinser Station where liquid developer is dispensed and then removed for enhanced photoresist coverage. The Photoresist Tool offers a variety of process cassettes, wafer edge-handling technologies, and tools to optimize photoresist coverage and mitigate process variability. SEMITOOL ST-870 also boasts a sprayed rinse station that is adjustable from 0 to 300 mm above the rotating substrate for complete rinse coverage with no need for rinser cassette adjustments. Additionally, the asset is equipped with an automated exposure control model and a multi-laser Targeting Equipment to ensure consistent approach of the exposure tool to each target. SEMITOOL ST 870 is also equipped with a bundle of safety features such as a hood enclosure, interlocking doors, reversed pressure control, and floor levelers to provide additional security, as well as a fail-safe system with visual alarms and an electronic architecture to manage preventive maintenance alerts. ST-870 Photoresist Unit is a versatile tool designed to meet the specific needs of high-volume production environments. With its range of sophisticated features, this machine efficiently and reliably processes photoresist for ultra-reliable results.