Used SEMITOOL STI 260D #123183 for sale

SEMITOOL STI 260D is a chemical etching equipment designed for use in photoresist processing and low-volume production applications. The system is designed primarily for use in etching and chemical processes such as RIE (reactive ion etching) and CMP (chemical-mechanical planarization) and can handle substrates of various sizes and types. It is capable of processing substrates up to 300 mm in diameter with a maximum etch rate of up to 1 mm/min and can handle various photoresist compositions. STI 260D includes a mechanically robust, all-aluminium vacuum chamber with a built-in, temperature-controlled backside coolant faucet. The unit features a quick-lock, multi-face electrode assembly, allowing for quick and easy electrode exchange without requiring the chamber to be opened. A three-axis, linear drive electrode machine allows for precise control over the electrode, minimizing material erosion and providing excellent uniformity in etching. The chamber is also sealed by an optional Faraday plate, which minimizes charge accumulation, reduces pattern distortion and improves the etch uniformity. The capabilities of SEMITOOL STI 260D are further enhanced by an advanced process control tool providing an array of features, including an intuitive user interface, real-time monitoring of process parameters, and a multi-program memory asset, enabling the operator to store and recall specific process profiles to maximize throughput and efficiency. The model offers straightforward process-recipe programming with visual processing validation, allowing the user to monitor the progress and quality of the etched material in real time. STI 260D is an efficient and dependable equipment for photoresist processing, with a cost-efficient design that meets the demands of both low-volume production and research and development. The system is equipped with a comprehensive safety unit to protect users, operators, and the process environment, and can provide efficient and consistent results with a fast turn-around time.