Used SEMITOOL STI 260D #9206432 for sale

SEMITOOL STI 260D
Manufacturer
SEMITOOL
Model
STI 260D
ID: 9206432
Wafer washer / Dryer.
SEMITOOL STI 260D is a photoresist equipment designed to be used in photolithography processes. It is a two-chamber vertical wet-etch processor with a capacity of up to 200mm2. The system is equipped with a Submerged Micro Vacuum Agitation Unit (SMVAS) to ensure uniform dissolution of the photoresist during the etching process. The SMVAS waves travel through the etch chamber at a frequency of 4 Hz and a wave-height of 25mm, resulting in highly uniform dissolution of the photosensitive layer. The Submerged Micro Vacuum Agitation Machine of the processor allows for the use of a wide range of etch processes, such as chlorine-based etch, ammonia-based etch, wet-etch phosphoric acid and ozone etch. Furthermore, the SMVAS is designed to reduce backside etch that is typically experienced in many etching processes. This makes it ideal for use in high-resolution applications. The processor is equipped with a 5-step controller and is housed in a standard 19-inch, 10U rack-mountable enclosure. The 5-step controller is an advanced computer-controlled process controller that provides easy-to-use, accurate, and reliable process control required for today's modern photolithography production. The control of each step is independently achieved using an intuitive software interface. This allows for the high level of repeatability and accuracy required for today's most advanced photolithography applications. The substrate holder of the processor can hold a maximum of 200mm2, making it ideal for production batches larger than those usually seen in the lab. In addition, the temperature of the etchant can be adjusted manually or by the controller to achieve optimal results. The tool also features safety features that will automatically shut off gas, solvents, and etch chemicals before they become a hazard. STI 260D is an excellent choice for any photolithography process. Its five-step controller and the SMVAS enable accurate, reliable, and repeatable process control, while its safety features ensure a safe and efficient workplace. The asset is ideal for production batches of 200mm2 or less and is housed in a standard 19-inch, 10U enclosure.
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