Used SEMITOOL STI 860 #9395485 for sale
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SEMITOOL STI 860 is a photoresist equipment designed to facilitate wafer processing for advanced microelectronics. The system's automated solution chemistry with options for immersion, spray and cycle time users to deliver consistent and reliable resist thinning for the best possible lithography results. The unit features a sealed environment to reduce exposure to airborne particles, as well as a direct zonal heating machine and bottom heater conveyor to ensure uniform heating and consistent wetting. A custom nozzle design delivers precise, consistent distribution on wafer surfaces with no over-spray, while a thin, low velocity curtain of solvent around the wafers efficiently removes photoresist with precise temperature control. A touch-screen interface provides users with a graphical overview of the tool's operations, enabling users to easily access settings and track process steps. In addition, the asset features an intuitive setup wizard, providing step-by-step instructions for users unfamiliar with the model. STI 860's patented process techniques allow users to tailor cycle parameters to match the performance of each individual photoresist. The equipment also features an optional sidewall protection that provides superior photoresist protection during the post-exposure bake and immersion stages, resulting in a higher level of wafer yields. SEMITOOL STI 860 provides high throughput of up to 60 wafers per hour and allows users to reduce cycle times without sacrificing quality or cycle repeatability. In addition, the automated system eliminates manual cleaning, reducing the risk of contamination and ensuring uniform results every time.
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