Used SEMITOOL WSST #9097197 for sale

SEMITOOL WSST is a suite of photoresist processing systems designed to accommodate a wide range of lithography requirements. The equipment consists of three main components: the main process chamber, the load locking chamber, and the bathtub. The main chamber is designed for deposition, etching, and cleaning of photoresist coats during semiconductor fabrication. It is equipped with a turbo pump for high-speed vacuum pumping and has the capacity to support a wide range of processes, temperatures, and pressures. The load locking chamber is used for transferring pre-treated wafers into an inert atmosphere before entering the main chamber. This chamber also serves as a buffer for maintaining optimum vacuum conditions inside the main chamber. The bathtub module is a low-pressure spray system for cleaning wafers between processing steps and can also be used for track cleaning and tin coating in advanced applications. The unit is further equipped with two independent computer controllers to monitor and control the process parameters. The controllers are interfaced to the main chamber, load lock chamber, and bathtub, and offer access to a variety of parameter settings, including chamber temperatures, gas flows, and process times. The controllers are also equipped with plasma ignition systems and provide comprehensive data logging, fault logging, and real-time display of process parameters. WSST provides reliable and cost-effective lithography and photoresist processing solutions for a variety of semiconductor components and applications. It is equipped with innovative process management and control systems which provide repeatable, uniform results for photoresist deposition, etching, and cleaning, as well as sophisticated performance monitoring and fault diagnosis procedures. The machine is designed for superior flexibility and ensures optimal photoresist performance with tight process control.