Used SEMITOOL WST-306 #9379931 for sale
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SEMITOOL WST-306 is a photoresist stripping equipment designed for strip and clean of photoresist from substrates. It works on the principle of injecting a sodium hydroxide and ultrasonic waves into the chamber. The system is typically used for the stripping and cleaning of photoresist in semiconductor fabrication. WST-306 features an open-work chamber with heated up to 108 °C, which allows heated chemical baths and turbulent cavitation. The unit is equipped with three channels, each for a different temperature and operating mode. The machine also has a pressure gauge designed to perform cavity pressurization and depressurization with precise control. The pressure gauge is used to maintain a specified pressure level in the resist strip process. SEMITOOL WST-306 can accommodate various sizes of photoresist substrates up to 200mm in diameter. It is also compatible with a variety of photoresist types, including AZ-, SU8- and ArF-photoresist. The tool includes a precision rotating lift platform that provides smooth mechanical lift motion, which can eliminate damage to delicate substrates. The lift platform allows easy access to the chamber for cleaning and maintenance. The asset can be operated either manually or through an automatic program sequence. In the manual mode, users can choose from a variety of pre-configured cycle parameters. It also features a programmable cycle storage option that allows up to 8 user-defined process profiles to be stored and recalled for later execution. WST-306 is ideal for applications that involve the stripping and cleaning of photoresist from semiconductor substrates. It is highly efficient and reliable, allowing for a consistent and repeatable process. The device also requires minimal maintenance, making it more cost-effective.
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