Used SEMITOOL WST-308 #9356458 for sale
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ID: 9356458
Wet solvent stripper, parts system
(2) SPIREC S2-8B12A Spiral plate heat exchangers
PACIFIC SCIENTIFIC 3820-4460-7-56C-CU
Power supply: 208 VAC, 60 Hz, 40 Amps, 3 Phase, 5 Wire.
SEMITOOL WST-308 is a photoresist equipment designed for ultra thin-line (UTL) lithography processes. This system enables complex patterning of ultra-thin lines and spaces below 200nm in a reliable, cost-effective manner. SEMITOOL WST 308 is equipped with advanced optics for precision exposure of photomasks in the UV range. The unit has a built-in dual-wavelength UV source and exposure lens with a numerical aperture (NA) of 0.49. This allows for the exposure of complex patterns of ultra-thin lines below 200nm and spaces below 200nm with exceptional accuracy. The exposure process is controlled through a programmable 'recipe' machine. This tool allows for the definition of a range of parameters such as exposure intensity, dose, and resolution. This ensures consistent results and repeatability from lithography batch to batch. WST-308 is also equipped with advanced metrology tools for mask inspection, process monitoring and fault detection. This allows for in-process verification and improved yield. The asset also features an integrated library of recipes which can be modified to quickly develop optimal process conditions. In addition, the model is designed to be easy to use and maintain. WST 308 is built on a user-friendly platform with an intuitive graphical user interface. This helps users quickly navigate the recipe library and adjust parameters as needed. SEMITOOL WST-308 is a powerful and reliable photoresist equipment designed for ultra thin-line lithography processes. Its advanced optics, automated recipe system, integrated metrology tools and intuitive UI make it an ideal choice for producing high quality, complex patterns with excellent consistency and repeatability.
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