Used SEMITOOL WST-406MG #7441 for sale

SEMITOOL WST-406MG is a high performance photoresist equipment designed for a variety of semiconductor processing applications. The system was designed to enable ideal sub-micron line and contact hole patterning, as well as rapid and even patterning of large area die. The unit comes complete with a process chamber, heaters, control unit, and software. The process chamber is constructed of 304 stainless steel and features a retractable quartz susceptor dome, which reduces thermal gradients. The heater is composed of two single-tube immersion heaters for fast turnaround and maximum power dissipation. The temperature is controlled by an independent electronic controller, which provides precise temperature control and uniform heating of the entire chamber. The machine utilizes a high intensity pulsed-coherent laser source, which enables rapid exposure of the photoresist. The laser source is coupled to a mechanically-scanned Y/Z gimballed galvanometer that provides precise exposure patterns. The tool also features a unique high-precision alignment subsystem, which ensures high accuracy exposure of photoresist patterns. WST-406MG features an integrated four-track dispense unit and a temperature-controlled automated spin-rinse-dry unit. This allows wafer processing to be performed with the highest levels of accuracy, consistency and speed. In addition, the asset is equipped with a loadlock station, which allows rapid loading and unloading without exposing the chamber to ambient room temperature. The user interface for the model is an Ethernet based graphical user interface (GUI). This provides convenient access to equipment settings, parameters and process recipes. The interface also allows for remote operation of the system. In summary, SEMITOOL WST-406MG is a robust, high performance photoresist unit designed for semiconductor processing applications. The machine provides precision patterning, accurate alignment and exposure, as well as fast and consistent wafer processing. The integrated GUI makes operating the tool user friendly and convenient.