Used SEMIX / TOK TR 6132U #57578 for sale
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ID: 57578
Wafer Size: 4"
Spin On Glass (SOG) Coater, 4"
One coating station
(3) Hot plates
Dual senders & receivers
U-Turn configuration
Dry air: PS, 1/4" Female, 4 to 7kgs / cm², 250 Nl / min
Cooling water: 20 A Vp, 1kg / cm², 10 l / min
DI Water: 20 A Vp, 2kgs / cm², 15 l / min
Temperature control range : 40°C - 70°C
Nozzle: Flat-type (PVC MVP-9010), cone-type EX-424
Rinsing time: 100 - 300 Seconds
Constant temperature reservoir: 10l Maximum 40°C - 70°C
Power supply: 200 VAC, Single phase, 18 Amps.
SEMIX / TOK TR 6132U is a photoresist equipment developed by TOK, a leading technology company in the semiconductor materials industry. The system is used for the fabrication of photolithography masks and semiconductor devices. The unit utilizes advanced photolithography processes to precisely pattern semiconductor materials. It comes with an integrated photographic simulator and multiple exposure parameters that simplify the process of creating intricate patterns on the substrate. Furthermore, it includes a two-step imaging process consisting of a pre-exposure and a post-exposure. The pre-exposure helps to ensure the uniformity of patterns across the entire substrate, while the post-exposure helps to refine the patterns and fix desired dimensions. The machine has a built-in digital image-processing tool that enables the users to adjust various parameters that affect the pattern printing process. These parameters include exposed facet orientation, pattern size, alignment accuracy, and image definition. The asset also comes with an automated substrate load/unload mechanism and a high-precision robot-positioning model to ensure an accurate pattern printing process. The user interface of the equipment is quite user-friendly and allows the users to adjust the parameters easily. It also includes a real-time monitoring system so that the users can continuously monitor the progress of the pattern printing process. The unit comes with a software program that enables the users to optimize and edit the pattern printing process. In addition, TOK TR 6132U is an efficient machine that is capable of producing high-quality patterns with a high success rate. Moreover, it is equipped with an automatic cleaning tool that helps remove undesired residues from the substrate during the printing process. Finally, the asset is also compliant with various international standards, such as IEC 60601, ISO 10605, and UL 60950. This ensures that the model can be safely used in a wide range of industries, including medical, aerospace, and communication technologies.
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