Used SEMIX / TOK TR 8171UD #131515 for sale
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ID: 131515
Wafer Size: 8"
Vintage: 1999
Spin on Glass deposition system, 8"
Parts system
(10) circuit boards
Part number: 900140062
ER 81078 V.1.01
(1/2) (2/2)
TAZMO
Options:
Temperature & humidity (coat unit)
Solvent system with remote cabinet
Exhaust, fume bake plates
Post Bake Station
3 light status pole
SECS II software
De-installed 2001
Currently de-installed
1999 vintage.
the SEMSIXSEMIX / TOK TR 8171UD is a high-performance photoresist equipment designed for a variety of advanced lithography tasks. The system includes a fully automated high resolution imaging unit and a full-size exposure processor. The advanced photoresist machine is capable of achieving sub-micron resolution due to its sophisticated image exposure control tool and exposure processing capabilities. Coupled with its automated control asset and large information capacity, SEMSIXTOK TR 8171UD can provide superior accuracy and repeatability. The SEMSIXSEMIX TR 8171UD comes with a microstepper motor drive for exposure systems and a lens for imaging, allowing it to support a wide range of exposure accuracies in the range of 0.5 to 10 µm. The microstepper motor drive is capable of exact speed and acceleration control and is ideally suited for lithographers requiring high speed and accuracy. In addition, the model also offers a choice of a number of imaging columns, which provides the equipment with image quality adjustment tools to achieve the highest resolution possible. Furthermore, the system provides compatibility with many of the most commonly used photoresist types, enabling it to be used on a wide range of substrates, including glass, silicon and silicon oxide. The SEMSIXTR 8171UD is equipped with an intuitive graphical user interface that simplifies the user experience and allows users to access and control the unit's functions simply and quickly. Moreover, the machine possesses multiple calibration functions and an internal memory store which can store image, film, and substrate data which allows for the optimization of imaging, exposure and processing procedures. Ultimately, the SEMSIXSEMIX / TOK TR 8171UD is a reliable and versatile photoresist tool that provides advanced lithography solutions with superior accuracy, resolution and repeatability. The asset is highly efficient and productive and can help to reduce time-to-market and costs associated with semiconductor fabrication.
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