Used SHOWA SFE-6130D #9020782 for sale
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ID: 9020782
Ion beam frequency adjuster
Set up to plate 5x7 oscillators
ULVAC WD401 Vacuum pump
LEYBOLD Turbo vac 1100C
Includes:
Frequency counter
Power supplies
Multi meter with extra filaments
Dual plates: Crystal, oscillator
Computer
Documentation.
SHOWA SFE-6130D photoresist equipment is a fully automated, integrated multi-stage process designed to develop, pattern, and etch electronic components, creating integrated microcircuits for various applications. The system utilizes a combination of electrochemical, thermal and chemical processes to create ultra-fine, high-resolution microstructures. SFE-6130D consists of a light source, a masking/illumination unit, a photoresist printhead, a developer, an inspector, and a media (etching media) processor. The masking/illumination unit contains precision optics that accurately focus light from the light source onto an electronic component that is mounted on a photolitographic stage. The photoresist printhead then applies a material (photoresist) that is sensitive to light in order to selectively pattern an area of the electronic component. Once the photoresist has been applied, it is then pre-baked and exposed to ultraviolet light in order to reduce the solubility (etchability) of the non-illuminated areas. A developer is then used to remove the non-illuminated areas of photoresist, leaving only the desired areas exposed. To verify the quality of the photolithographic pattern, an inspector is typically used to inspect the pattern for defects or other imperfections. The final step is to etch away unwanted material from the electronic component, creating the desired microstructure. For this step, an etching media processor provides an etching solution, such as hydrochloric acid, that is used to chemically etch away the unwanted material. The unit also provides an optional post etch drying station and surface conditioning machine for surface cleaning and finishing. Overall, SHOWA SFE-6130D photoresist tool is designed for reliable, high-quality production of electronic components, while maintaining tight tolerances and high resolution. The photolithography process allows for increased flexibility in design, efficiency in production, and improved cost savings in fabrication. The asset also offers the added benefit of automated processes through its state-of-the-art, integrated process model.
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