Used SICONNEX Batchspray #293712196 for sale
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ID: 293712196
Vintage: 2021
Spray solvent system
Solvent module
Autoload:
(4) Loadports
(2) Batchspray systems with robot
(25) Wafer handlers
Single wafer handler
Process handler
Wafer station, 4"
Transfer handler
Handling station
Retainer comb handling, 8" / 50 Wafer:
(3) Retainer combs
Handling system capable to handle up to 52 wafers
Loadport: Cassette (SMIF, FOUP)
Filter fan unit: Clean room cell
CO2 Fire suppression package:
Weight controlled CO2 Bottle
Flame detection for tank chemical cabinet / Electrical cabinet
Piping / Injector
Spare parts package solvent:
Retainer comb
Vibration damper
Rear bowl seal
Ferrofluid bearing
Tank O-ring
Filter housing O-ring
Manifold valve block
UPS Accumulator
Seal nozzle
PT100 Tank
2021 vintage.
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