Used SOLITEC 5110 #9363072 for sale
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SOLITEC 5110 photoresist equipment is a production equipment designed to expose photoresist material onto substrate material. It uses the classic photolithography process and is able to produce high-resolution, high-quality circuit patterns with consistent results. 5110 is a full-featured system, comprised of a 6-axis lithography stage assembly, the main control unit, and an annotation unit. The lithography stage assembly consists of a stage base, two intermediate stages, and a micro-stage. All the stages can be operated individually, and the total travel range of the machine is 25x25 micrometers. The stage is coupled to the main control unit, which is equipped with a touchscreen interface. This allows users to precisely control the positioning and movement of the stages and the exposure parameters for the photoresist process. SOLITEC 5110 comes with a variety of photoresist materials ready for processing, including positive and negative tone materials as well as dual layer materials. It also allows for various exposures times, ranging from 0.2 to 1600 seconds, as well as manual and automatic patterning. Additionally, it has a pre-programmed curve bias control tool that ensures the photoresist is pre-exposed evenly. The annotation asset allows users to accurately and quickly annotate patterns during the exposure process. This annotation model is highly reliable and its data is stored in an internal memory. The equipment also offers various alignment functions, including in-situ wafer alignment and corrected-plane alignment, as well as rotation and pre-exposure registration. 5110 system is easy to use yet highly precise and accurate. It is a perfect solution for those requiring high-resolution, short-turn-around photoresist process. The unit is fully automated and reliable, providing a consistent high-resolution and high-quality pattern throughout the process.
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