Used SOLITEC S822 ACB #9354008 for sale

Manufacturer
SOLITEC
Model
S822 ACB
ID: 9354008
Vintage: 2001
Dual track coater system Manual and spare parts included 2001 vintage.
SOLITEC S822 ACB is an advanced chemical-mechanical (CMP) photoresist equipment that is used in a variety of etch, deposition, and planarization processes. It is designed for high-precision dielectric polishing that requires a low level of contamination in order to maintain perfect planarity. The system uses an air cushion belt (ACB) for gentle, low-damage polishing, while its advanced photoresist technology ensures consistent results. S822 ACB consists of a durable and corrosion-resistant stainless steel frame, a 2hp variable-speed motor, and a heavy-duty transport table. The motor is designed to provide smooth, reliable, and even motion, making it ideal for precision processes. The transport table is designed to securely hold the wafer during polishing, and is equipped with a recirculating slurry management unit to minimize carry-over and minimize the amount of product needed during processing. SOLITEC S822 ACB also features an advanced control machine that allows for precise control of basic parameters like pressure, mechanical/chemical combo action, and polishing direction. This ensures excellent planarization of small and complex shaped parts. Its advanced polishing head is designed to fit a variety of wafer sizes and features an active cooling tool to minimize thermal degradation and preserve the quality of the material being processed. S822 ACB is designed for use with a range of photoresists, including organic and inorganic types. These materials provide excellent etching selectivity, enabling higher yields and higher quality products. Its advanced slurry management asset ensures that only the optimal amount is used for each step of the polishing process, providing efficient, cost-effective operation. SOLITEC S822 ACB is an excellent choice for high-precision dielectric polishing. Its robust design and advanced features make it a reliable and cost-effective choice for a wide range of applications. Its advanced photoresist technology combined with its sophisticated control model and Polishing Head provide excellent planarity, superior yields, and reliable, cost-effective operation.
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