Used SPAMI Ace II #293660330 for sale

SPAMI Ace II is a complete photoresist equipment developed by SPAMI Co. for use in industrial semiconductor applications. The system incorporates a multi-scanning laser exposure module, rinse station, and auto-clean unit to provide high throughput and excellent step coverage. Ace II machine works by using a laser exposure module to transfer patents onto a variety of semiconductor wafer sizes. The laser exposure module comprises of a diode laser array, synchronous scanning, and precise positioning control. The laser exposure module enables the tool to print highly complex and detailed patterns with extremely accurate feature sizes and line widths. The rinse station is used to remove photoresist residues after exposure. It contains a set of removable PCB boards for plug-and-play integration into SPAMI Ace II asset and features a low-pressure Rinse Rinse Rinse Pressure (RRR-P) flow detector, which prevents photoresist residues from building up and interfering with the imaging process. The auto-clean model is used to optimize process tooling cleaning operations. It includes a moving stage for precise substrate positioning and has a built-in cleaning robot with a two-axis servo drive for augmented cleaning precision. The auto-clean equipment reduces process tooling downtime, helping to improve throughput, while also optimizing cost of ownership and photoresist cleanliness. Ace II photoresist system also supports advanced features such as pattern mirroring, a double illuminated wafer design for multi-layer processing, and an array of wafer sensor heads for sensitive thickness and focus measurement. Its modular design simplifies installation, maintenance, and upgrades while providing excellent performance and flexibility at a low cost of ownership.