Used SSC BPE-2708-SP #9220820 for sale
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ID: 9220820
Wafer Size: 8"
Vintage: 2006
Gold plating machines, 8"
Plating mechanism: Fountain, face-down
Manual wafer load and unload
Solution: Non-cyanide, Au solution
Solution capacity: (14) Cups, 8"
Temperature control: Direct heating
Mechanism: PID Control
Temperature control range: Room temperature to ~70°C
Flow rate: Auto control by flow sensor, cup / Pump control mechanism
Plating tank: Laminate
Upper lid: PVC
Cup holder: HT-PVC and PPS, 8"
Upper lid arms: SUS Coated with PTFE
Upper lid open / Close: Air cylinder
Fountain pump: Polypropylene
Valve: PTFE AV valve, HT-PVC, PVC and PFA
Piping of Au solution: HT-PVC, Polypropylene and PFA
Piping of DIW and drain: HT-PVC, PVC, and PFA
Piping of exhaust: PVC
Plating unit: PVC
Cup location: (7) Lines x (2) cups
Fountain pumps: (14) MD-100FYK With inverter control: 8~50 L/min
With cup / Pump flow rate
Circulation pumps: (2) MD-100FYK With inverter control
With (2) circulation piping lines
Fountain filtration: (14) Sets of PP (housing and cartridge)
Circulation filtration: (2) sets of PP (housing and cartridge)
Solution level control: N2 level sensor for each solution tank
With (2) upper, lower, fixed, additive
Sensors: Temperature, leakage, flow rate, area
(4) Heaters, 3 kW
Power supply: Cabinet (Caster and adjuster)
Fixed electrical current
2-Channel switch: (2) 8~3000 mA (8 ~300 mA)
Precision: ±0.5 % by 300 mA
Control: Sequence control
Touch panel and PLC
Data recorded PC
(30) Programmable numbers
(90) Recipes per programmed number
Count current mod (mA / Hour)
Bump height uniformity: ≤ 5 % (10-15) points / Wafer
Bump height uniformity: ≤ 2 um - ≤3 um, 8" (80-120 points)
Flow rate: 35 L/min, no leakage from backside
Edge contact area / Cathode
No plating cup
2006 vintage.
SSC BPE-2708-SP Photoresist equipment is an advanced automated, precision laser exposure system designed to meet the needs of rapidly evolving fabrication technologies. It is ideally suited for advanced photolithography applications that require high precision and high detail resolution. At its heart, the unit is equipped with SSC proprietary solid-state laser machine. This laser tool produces high-powered pulses at a variety of adjustable frequency, duration, and energy levels that can precisely and accurately exposure photoresist material without causing damage. The asset further includes a pair of high-resolution camera systems, designed to monitor and control the laser exposure process. This ensures that each pass of the laser precisely follows the pre-determined pattern, resulting in a uniform photoresist exposure. In addition, the model includes an automated material handling equipment factors. This enables the operator to quickly and easily load two standard masks per photolithography job, maximizing throughput. The material handling system ensures that the masks can be precisely positioned before the laser is fired, resulting in high precision and repeatability. The unit also includes a high-powered and capable archiving machine. This enables the operator to store photolithography settings and parameters for easy recall, further maximizing throughput. The tool is controlled via an intuitive, easy-to-use interface. This display includes real-time feedback on photolithography progress, providing a visual summary of the results of each laser exposure step. Overall, BPE-2708-SP Photoresist Asset is an ideal solution for advanced photolithography applications that demand high precision and high detail resolution. Its robust feature set and automated material handling enables high throughput and ensures repeatable and consistent results with every job.
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