Used STEAG Marangoni #138851 for sale

Manufacturer
STEAG
Model
Marangoni
ID: 138851
Wafer Size: 6"
Vintage: 1994
IPA Dryer, 6" Stand alone 1994 vintage.
STEAG Marangoni is a modern photoresist equipment that is used in semiconductor, MEMS and other microelectronic fabrication processes. It consists of a special sensitizing emulsion that is applied to a substrate, typically a silicon wafer, in order to make it more sensitive to laser light exposure. The emulsion consists of an aqueous solution of an organic base and compounds containing photoactive compounds. When the substrate is exposed to laser light, these compounds rapidly dissociate, forming radicals that enter into photochemical reactions, forming an aluminum oxide film on the substrate. Marangoni photoresist system is designed to provide superior lithography results with exceptional accuracy and consistency. The thickness and surface of the aluminum oxide film produced by the unit are highly uniform and conform closely to the substrate topography. This precision is due to high-quality antireflection coatings that are added to the substrate, as well as to the high-accuracy deposition of the photoresist emulsion. In addition to providing superior lithographic results, STEAG Marangoni photoresist machine also has excellent adhesion and thermal stability. The adhesion of the aluminum oxide film to the substrate is excellent, allowing the photoresist film to remain firmly attached. The thermal stability of the photoresist enables it to withstand temperatures of up to 300℃ with no significant loss of adhesion. Marangoni photoresist tool can be used in a wide range of applications, including the production of semiconductor devices, MEMS devices and other microelectronic components. It is especially suited to the fabrication of semiconductor components with high aspect ratio features, such as trenches, grooves and cavities. Its superior lithography results and high thermal stability make it the ideal choice for microelectronic fabrication applications that require precision and reliability.
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