Used STEAG / MATTSON / AST Marangoni #9267094 for sale
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STEAG / MATTSON / AST Marangoni is a photoresist equipment developed to enable precision etching and patterning on a variety of surfaces. It uses a sophisticated combination of ultraviolet (UV) light irradiation and post-exposure thermal processing to accurately dissolve targeted areas of the substrate. The photoresist material is applied to the targeted area as a liquid. When exposed to UV light, the exposed parts of the liquid turn into a solid. After irradiation, the sample is heated using a custom-built AST Marangoni Application System Thermal Unit (MASTU). This process causes the reacted photoresist to dissolve in a controlled manner. To ensure that the un-irradiated material is not affected, the heat has to be accurately regulated through the use of an advanced thermal control unit. The process enables microfabrication of tall and thin structures, exactly where intended, and with high vertical fidelity. It also allows for fine angles and microchannels to be formed, as well as the precise control of resist thickness. STEAG Marangoni is particularly suited to thin-film device structures, such as MEMS (MicroElectroMechanical Systems) and NEMS (NanoElectroMechanical Systems). It is also very successful in other fields such as medical devices, energy harvesting, and sensors, amongst others. Marangoni is suitable for both large area and small area photoresist patterning. As well as being an extremely cost effective way to accurate pattern a wide variety of materials, it is also an environmentally friendly solution, and does not require the use of any hazardous chemicals. In conclusion, MATTSON Marangoni is a reliable machine for achieving precision etching and patterning in a cost effective and safe way. It can be used for a broad range of applications, and its high accuracy and non-toxic technology are helping to make innovating device fabrication easier and more efficient.
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