Used SVG 8028 #9396689 for sale

Manufacturer
SVG
Model
8028
ID: 9396689
Wafer Size: 5"
Tracker system, 5".
SVG 8028 is a photoist equipment designed for automated photolithographic processing of nanoscale structures. It is a reliable and pulse-size sensitive system that uses Polyvinyl Cinnamate (PVC) as passivation material. This unit features a wide range of options and extremely precise control of parameters. 8028 consists of two main components: the Light Source Module, or LSM, and the Scanning Electron Microscope (SEM) with its UV Curing Chamber. The machine can be setup and operated through a graphical user interface and the same software controls the LSM, the SEM, and the UV curing chamber. The Scanning Electron Microscope (SEM) is used to image the structures with a high resolution and low voltage electron beam. The tool is capable of achieving resolution down to sub-nanometer level. As the electron beam moves along the structure, the resist is deposited onto the surface and then cured in the UV curing chamber. The cured resist provides an insulating layer. The SEM is capable of magnifications up to 500x and can analyze complex 3D structures. The SEM is used to evaluate both planar and topographic detailed features. The Light Source Module (LSM) is an external source for light illumination. It provides a monochromatic beam with variable parameters, including power, polarization, angle incident, and wavelength. The LSM offers access to various options such as a multiple angle of incidence, polarized light, variable beam spot size, laser beam focusing, and dark-field/bright-field illumination. It has proven to be reliable and extremely effective in automating the photolithographic processing. The UV curing chamber works in combination with the LSM and SEM to produce resists with high performance and stable performance during processing. The curing chamber has a precision temperature control that allows for highly stable resist material. The chamber is also equipped with an acoustic piezo asset and a built-in vacuum model to ensure an effective cure. SVG 8028 is an extremely versatile equipment in the arena of nano-scale processing. It offers reliable and accurate control over a wide array of parameters and a wide variety of process options. The system is capable of producing high precision 3D structures and provides excellent resolution for complex nanostructures. In addition, it is cost efficient and requires minimal maintenance.
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