Used SVG 8600 Series #9294223 for sale

Manufacturer
SVG
Model
8600 Series
ID: 9294223
Coater / Developer / Scrubber track system.
SVG 8600 Series is a photoresist equipment composed of advanced energy technologies that have been developed to optimize patterning processes. It offers high-resolution photoresist imaging and can be used for a variety of applications. 8600 Series system uses advanced laser inducement and film imaging technologies to form nanoscale patterns with the highest accuracy and transparency. It features an interactive LCD touchscreen that allows users to quickly and easily adjust settings and monitor the process in real time. This unit utilizes a high-speed, multi-axis substrate carousel to achieve a fast throughput across substrates that range from 5 mm to 150mm wide. In addition, it features a stepper motor-driven rapid focus adjustment, allowing for precise and repeatable processing. SVG 8600 Series is designed for use with a variety of photoresist materials and substrates. It allows users to select from a wide range of resist thicknesses and offers rapid exposure parameters that provide consistent resolution down to 0.2 µm. Its wavelength versatility provides patterning accuracy across the UV to VIS spectrum, with its powerful design accommodating up to 200W tungsten halogen illuminators. In addition to excellent imaging and exposure, this type of photoresist machine requires robust safety features. 8600 Series contains novacuum substrate exposure, safe laser operation and dosing systems for precise resist deposition and developer mixes. This photoresist tool is also equipped with laser safety protection interlocks, which monitor and activate safety systems when abnormal irradiation is detected. SVG 8600 Series is an efficient photoresist asset ideal for use in advanced patterning processes. This model provides the utmost in accuracy and transparency, with interactive screens, rapid focus adjustment and a wide range of substrates, materials, and resist thicknesses. Utilizing laser inducement and film imaging technologies, 8600 Series minimizes patterning errors for a more consistent and reliable product.
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