Used SVG 8800 #9094408 for sale
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ID: 9094408
Wafer Size: 6"
Developer system, 6"
Chemical cabinet
Alarm box
Developer 21/22.
SVG 8800 is a photoresist equipment used for both the photolithography and the etching of integrated circuits (ICs). It is a versatile tool for processing materials such as polymeric, organic, metal, and composite materials. As a higher-end photolithography system, 8800 is used for advanced process requirements and critical device fabrication with high precision. SVG 8800 consists of an immersion scanner, a beam source, a digital pattern generator, and an image capture or enhanced optics configuration. The immersion scanner provides a range of scan fields to support IC resolves down to 50 nm. It utilizes high numerical aperture (NA) of 1.35 and a specially designed mask plate to deliver increased process latitude. The beam source consists of a pulsed excimer laser, a beam shaping unit, and a frequency doubled Nd:YVO4 laser that emits at 532nm wavelength. It provides a choice of wavelength, focus, and pulse energy to accurately expose photomasks with high depth of field control. The digital pattern generator is an automated machine that accurately translates the circuit design application data into precise printing parameters needed for the beam source. This allows the substrate exposure to be optimized for a variety of materials and processes. The image capture and enhanced optics configuration captures high-resolution images from the substrate before and after printing. It also performs pattern critical to layer (CTL) measurements, stitch measurements, and channel characterisations. In summary, 8800 is an advanced photolithography tool offering excellent performance for both processing and imaging. It has a range of features such as a higher numerical aperture, pulse energy control, automated pattern generator, and high resolution image capture. Combined, these allow it to deliver precision processing for IC manufacturing up to 50 nm resolutions.
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