Used SVG 8832 #293667132 for sale

SVG 8832 is a high performance photoresist system developed by SVG Chemicals. It is a type of chemical-mechanical polishing (CMP) resist that is formulated for use in semiconductor fabrication processes, such as planarization or polishing of interconnects and low k dielectric layers. The chemistry is based on functional epoxide monomers that are polymerized into a crosslinkable film, which is then applied to a substrate with a spin-coat system. After spin-coating, the film is exposed to UV or visible light, which causes the crosslinking of the polymerized film. This allows the resist to be selectively removed when processed in CMP systems. 8832 has a low dissolution rate and exhibits excellent stability in CMP slurries. It also has a low shrinkage rate that is especially beneficial for through-silicon via (TSV) applications. SVG 8832 resists also feature good adhesion on copper and other metals, and they are compatible with both O2 and H2 plasma processes, allowing for faster and more reliable post-polish treatment. Moreover, 8832 resists are environmentally friendly and safe to work with due to their low photobleaching properties when exposed to sunlight and their low volatility. This makes them ideal for use in process steps that require dry or wet-etch processes. Furthermore, they can be used in a wide range of temperature ranges, allowing for their use in different applications. In conclusion, SVG 8832 is a well-rounded photoresist system, providing excellence in CMP processes while remaining fully compatible with a variety of working environments. Its low shrinkage rate makes it particularly suitable for through-silicon via applications, while its low dissolution rate and excellent stability in CMP slurries ensure that it fits a range of chemicals and substrate protection needs.