Used SVS / SCIENTIFIC VALUE SOLUTIONS MSX-1000 #293760261 for sale

SVS / SCIENTIFIC VALUE SOLUTIONS MSX-1000 is a photoresist exposure and development equipment specifically designed for aggressive lithographic fine line processing. This system is a programmable, automated exposure and development apparatus designed to provide continuous process solutions for the narrowest feature requirements in both positive and negative tone photo resist processing. The unit has a single mechanism comprised of a precision linear stage and a single-axis servo motor which allow the machine to move accurately along the X-axis and the Z-axis with a speed of up to 0.1mm per second. The exposure and development head is capable of user-defined programmable motion patterns in X, Y, and Z with space resolution of 1μm/stepping. SVS MSX-1000 provides multiple resolutions including 0.4μm, 0.5μm, 0.7μm, 1μm, and 1.2μm. The tool also offers a variety of exposure modes including Brightfield, Darkfield, Edge Sharpening, Contrast, and Resolution Enhancement. It is also capable of doing variable repeat exposures, variable multiple exposure, multiple layers exposure, 2D/3D offset exposures, and simultaneous 3-axis exposures. It can also accommodate a variety of photo resist materials including deep-UV, visible, and infrared photoresists. SCIENTIFIC VALUE SOLUTIONS MSX1000 has a user-friendly control interface to easily manage, save, and reload asset settings including all exposure and development parameters. Moreover, MSX-1000's servo driven module construction also provides precise alignment and compensation for substrate handling and temperature changes. This model comes standard with a range of available in-situ metrology tooling and inspection equipment which allow users to monitor print position and depth of field during the exposure process. SCIENTIFIC VALUE SOLUTIONS MSX-1000 ensures superior profile control, low-Critical Dimension (CD) variation, and superior printability, thus helping to eliminate inefficient iterations incurred by process misalignments and instrument drift. It is designed for process efficiency and reliability which minimize labor and cost in reducing product cycle time. With its features and capabilities, MSX1000 provides an ideal solution for lithographic fine line printing.