Used TEL DUO #293670501 for sale

TEL DUO
Manufacturer
TEL
Model
DUO
ID: 293670501
Wafer Coater / Developer system.
TEL DUO is a equipment of photoresist materials used in the fabrication of electronic and optoelectronic components. It is a combination of two polymers layers, each with a different reactive dye. In this regard, the entire system materials are collectively known as a 'photoresist'. DUO was developed by Tokyo Electron (TEL), and is used in the manufacturing process of semiconductor devices. It is widely used due to its superior chemical and environmental resistance and its ability to act as a photoresist to light, heat and corrosion. TEL DUO unit is a two-layer structure coated initially with a silicone-based ultraviolet (UV) photoresist layer. This layer is then applied with a photosensitive resist agent. Using exposure to UV light and chemical etching techniques, the ultra-thin photoresist layers are created with a high degree of precision. The second layer of DUO machine is a positive-tone photoresist layer that is coated on top of the UV-exposed photoresist. This layer helps to create patterns in the photo-resistant layer with greater precision than what is achievable with standard UV resist. In applying TEL DUO process, the ultraviolet light is shone down from above the substrate layer, and the top photoresist layer is exposed through a mask. Once exposed, the top layer is then etched off using a chemical reagent, revealing the patterned photoresist layer underneath. The advantages of DUO photoresist tool are numerous. Not only does it provide superior chemical and environmental resistance, it also enables high precision the fabrication of small and complex electronic and optoelectronic components. Furthermore, its dual layers of protection are much more durable than just one layer, thus providing an increased lifespan to those components which are exposed to harsh conditions. Finally, as TEL DUO asset is able to easily be used with existing lithography systems, it can be quickly implemented in semiconductor device and optoelectronic component fabrications.
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