Used TEL / TOKYO ELECTRON ACT 12 #293630206 for sale

TEL / TOKYO ELECTRON ACT 12
ID: 293630206
Vintage: 2010
System 2010 vintage.
TEL / TOKYO ELECTRON ACT 12 is a photoresist equipment used for a variety of semiconductor manufacturing applications. The system is capable of handling a wide range of critical photolithography steps, allowing engineers to achieve high-resolution features as small as 10 nanometers. It features a programmable, multi-power source, allowing for a high degree of flexibility in terms of overlay and pattern transfer. TEL ACT 12's unit architecture was created to make the maximum use of existing equipment, including its lithography table, optical components, and patterning functions. Its user-friendly software interface makes it easier for engineers to create intricate electronic patterns with unprecedented precision, including reverse-probing for greater accuracy. TOKYO ELECTRON ACT12 also features a reliable and robust motion control machine which performs with high levels of speed and accuracy. Its dual beam scanner enables precision multi-layer imaging, with galvanometric scanning and a motorized θ-z stage providing a wide swath of adjustment to aide in the optimal design of the pattern. Its integrated control components offer automated, worry-free operation and precision accuracy. This tool is designed to reduce the exposure cycle time and increases throughput. Furthermore, the asset offers powerful alignment and optimization functions, as well as superior defect-detection capabilities and enhances photoresist handling reliability. TOKYO ELECTRON ACT 12 has been designed to provide customers with superior performance and reliability. This model is to be highly successful in the semiconductor and electronics industries, offering unparalleled exposure uniformity and stable, repeatable exposure dose control. Users can expect quick return on investment and increased productivity. In addition, this equipment is built to ensure higher yields, improved step coverage, and consistent wafer-to-wafer performance.
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