Used TEL / TOKYO ELECTRON ACT 12 #9088377 for sale
URL successfully copied!
Tap to zoom
ID: 9088377
Dual Block System
Paired with Nikon S204 Scanner
(4) Cassette Blocks
T&H Units & Filter Controller Units
AC Power Unit
(2) Chemical Cabinets.
TEL / TOKYO ELECTRON ACT 12 is a photoresist equipment that uses ultra violet (UV) light to expose a photoresist material to create a pattern. This pattern can then be etched into a substrate, such as a silicon wafer, to create integrated circuit components and devices. TEL ACT 12 is a "5-in-1" system, meaning it houses five different components into a single unit. This includes: a scanner, an acceptor, a UV lamp, a controller and a contact exposure unit (CEU). The scanner is a device that moves over the photoresist material in a repeating pattern, which exposes the molecules to UV light. The acceptor is a condensation unit which cools the resist down to the optimal temperature for UV exposure. The CEU is a chamber which holds the resist and light source in an air-tight environment, which aids in exposure stability to produce uniform results. The UV source is a high-powered lamp which emits UV spectrums, specifically in the 300-400 nm wavelength range. This type of light is necessary for photoresist exposure, as it serves as the catalyst to initiate chemical reactions in the molecules. The controller runs the entire unit, and ensures all parameters for exposure are met. TOKYO ELECTRON ACT12 is capable of exposing photoresist in fine detail. This precision results in complex patterns that can replicate various components, such as transistors and capacitors, on a silicon wafer. It also has the capability to expose films as thin as 0.5µm, which is necessary to make production cost effective and increase yield. In addition, ACT 12 is also highly reliable and cost efficient. More so, it is user friendly and highly effective, making it ideal for producing microchips and integrated circuits. In conclusion, ACT12 machine is a powerful tool for the production of microchips and other integrated components. Its versatility and precise results, thus make it a top choice for those applications.
There are no reviews yet